Sponsors » Current Support

KLA Corporation
1 Technology Drive
Milpitas, CA 95035 USA
phone: +1-408-875-3000

Booth 30

KLA Corporation is a leading supplier of wafer processing, process control and yield management solutions for the semiconductor industry. Products for MEMS device manufacturing include Si DRIE and other plasma etch processes; vapor release etch using HF or XeF2; molecular vapor deposition (MVD®); plasma-enhanced CVD; PVD processes; and a range of inspection and metrology solutions.